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问题: 请帮我看一下有无语法和句型有无问题,谢谢,在线等

The characteristics of copper film coated on cenosphere particles using magnetron sputtering method were investigated by field emission scanning electron microscope (FE-SEM), X-ray diffraction (XRD), field emission transmission electron microscope (TEM) and atomic force microscope (AFM). The FE-SEM and AFM results show the grain sizes and root-mean-square (RMS) roughness values of copper films increase with the increase of sputtering power or deposition time and the copper films growth is a three-dimensional island growth mode.

解答:

修改如下: (主要是规范化, 不算语法错误)

The FE-SEM and AFM results show THAT the grain sizes and root-mean-square (RMS) roughness values of copper films increase with the sputtering power or deposition time and THAT the copper films growth is a three-dimensional island growth mode.