The angular distribution (angle-of-incidence) and adatom mobility are the two important factors to influence the film growth processes and the film properties. A new film growth model, which is called variational angle distribution growth model, was brought forward to explain the growth mechanism of copper film coated on cenosphere particles in the paper. The unceasingly variational angular distribution can get rid of the physical shadowing effect of the sputtering deposition and promote a rather smooth film growth. Deposition with high adatom mobility materials creates larger diameter islands than deposition with low adatom mobility ones.

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The angular distribution (angle-of-incidence) and adatom mobility are the two important factors (that) influence film growth processes and film properties. A new film growth model, (also) called variational angle distribution growth model, was (developed) to explain the growth mechanism of copper film coated on cenosphere particles. The unceasingly variational angular distribution can (diminish) the physical shadowing effect of the sputtering deposition and promote a rather smooth film growth. Deposition with high adatom mobility materials (often) creates larger diameter islands than materials of lower adatom motilities.